AVS 53rd International Symposium
    Nanometer-scale Science and Technology Wednesday Sessions
       Session NS-WeA

Paper NS-WeA6
Electrical Contact Metallization to Self-Assembled Large-Scale Carbon Nanotube Arrays

Wednesday, November 15, 2006, 3:40 pm, Room 2020

Session: Nanotube Devices and Processes
Presenter: J.H. Bak, Seoul National University, Korea
Authors: J.H. Bak, Seoul National University, Korea
B.Y. Lee, Seoul National University, Korea
S.S. Hong, Seoul National University, Korea
S. Hong, Seoul National University, Korea
Y.D. Park, Seoul National University, Korea
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We report on the investigation of various metallization schemes to electronically probe self-assembled large-scale carbon nanotube arrays. Reliable and highly reproducible metallization scheme to realize ohmic contacts to single wall carbon nanotubes (swCNT) by Palladium and Gold metallic thin films is an important technological step for the realization of swCNT-based nanoelectronics and their applications as well as self assembled large scale CNT arrays being technological attractive for mass-production of swCNT-based devices. Although electrical contacts to individual swCNT by Cr, Ti and Pd have enabled the observations of ballistic electron transport in swCNTs,@footnote1@ the systematic study of metallization to self assembled large scale CNT arrays and the elucidation of its electrical properties have been limited. Large-scale CNT arrays are selectively patterned via directed-assembly strategy on areas defined by self-assembled monolayer patterns.@footnote 2@ Metallization and electrical properties of resulting contacts are studied by patterning submicron contact electrode on 2µm wide CNT array elements by e-beam lithography followed by the e-beam evaporation of contact metals of which contact spacing is varied from 300nm to 2µm. Contact spacings greater than 2µm represent mixed nanotube junctions properties. We found Pd contacts show both ohmic and nonhomic contact behavior whereas Cr and Ti metallization result in nonohmic contacts. @FootnoteText@ @footnote 1@ D. Mann et al., Nano Letter 3, 1541 (2003).@footnote 2@ S. Rao et al., Nature 425, 36 (2003).