AVS 53rd International Symposium
    Nanometer-scale Science and Technology Thursday Sessions
       Session NS-ThP

Paper NS-ThP26
Topographical Studies of Nanoscale Secondary Structure of Electrochemically Anodized Aluminum Surface

Thursday, November 16, 2006, 5:30 pm, Room 3rd Floor Lobby

Session: Nanoscale Science and Technology Poster Session
Presenter: T. Sugiyama, Kanto Gakuin University, Japan
Authors: T. Sugiyama, Kanto Gakuin University, Japan
H. Kato, Kanto Gakuin University, Japan
S. Takemura, Kanto Gakuin University, Japan
Y. Watanabe, Kanto Gakuin University, Japan
H. Matsunami, Kanto Gakuin University, Japan
Y. Takarai, Kanto Gakuin University, Japan
M. Izumiyama, Kanto Gakuin University, Japan
A. Ishii, Kanto Gakuin University, Japan
T. Hiramatsu, Kanto Gakuin University, Japan
N. Nanba, Kanto Gakuin University, Japan
O. Nishikawa, Kanazawa Institute of Technology, Japan
M. Taniguchi, Kanazawa Institute of Technology, Japan
Correspondent: Click to Email
An electrochemical anodization technique was applied for fabrication of surface nanoscale structure on Al. Sub-micron to nanometer scale surface structure is a prospective candidate for highly functional nanometer scale devices, especially in the field of inorganic-organic hybrid devices and molecular devices as a nano-pattern template. In the present work, the surface was cleaned with several stages of wet cleansing process using Semico Clean and pure water under ultrasonic waves before applying anodization techniques to Al plate. The process of anodization was conducted by applying a positive voltage to Al plate as an anode in a H2SO4 solution with various concentration. The anodized Al and Cu surfaces processed under different conditions were investigated by dynamical force microscopy (DFM) and scanning tunneling microscopy (STM). A crater-array pattern was observed in a flat area. The diameter size of the crater was 100 nm to 200 nm, linked each other making a scaled pattern with the clear-cut contour, covering wide range area with 5 micrometer square. In the scaled pattern, the linked craters covered up-and-down hills with several nanometer height difference. Focusing on a crater, small crater with several tens nanometer diameter was created in the large crater. A detailed image of Al surface of another sample prepared under a different condition showed the nanoscale secondary structure in the crater-array pattern so that 20 nm to 30 nm-sized holes were arrayed in a 100 nm-sized crater, which is quite a unique pattern as a nanoscale template. Furthermore, copper phthalocyanine (PcCu) molecular layer deposition was conducted on scaled pattern of Al surface by wet and dry techniques. Characteristic PcCu configuration was confirmed by DFM, XPS, and FTIR measurements. This work was supported by High-Tech Research Center Project aided by MEXT. The authors would like to thank Dr. M. Shigeno, SII Nano-Technology Co. Ltd for a technical assistance.