AVS 53rd International Symposium
    Nanometer-scale Science and Technology Thursday Sessions
       Session NS-ThP

Paper NS-ThP19
Development of the Integrated Manipulation System using 3-D Nano-Manipulator Fabricated by the Focused-Ion-Beam Chemical-Vapor-Deposition

Thursday, November 16, 2006, 5:30 pm, Room 3rd Floor Lobby

Session: Nanoscale Science and Technology Poster Session
Presenter: R. Kometani, University of Hyogo, Japan
Authors: R. Kometani, University of Hyogo, Japan
K. Kanda, University of Hyogo, Japan
Y. Haruyama, University of Hyogo, Japan
T. Kaito, SII NanoTechnology Inc., Japan
S. Matsui, University of Hyogo, Japan
Correspondent: Click to Email
Nano-factory is necessary to carry out the manipulation, manufacturing and analysis by high-accuracy. For the nano-factory creation, the high-performance nano-tools such as manipulator, emitter, sensor and so on are required. Therefore, we have been researching the nano-tool with the three-dimensional (3-D) structure by using the focused-ion-beam chemical-vapor-deposition (FIB-CVD) for giving the high-performance to the nano-tools. FIB-CVD is the key technology for 3-D nano-structure fabrication. This time, we established the integrated manipulation system by using 3-D nano-manipulator fabricated on the tungsten probe by FIB-CVD. 3-D nano-manipulator have 4-fingers, made of the diamond-like carbon, for catching the target with various structures flexibly. Gap distance of fingers was about 500 nm. Driving force of the 3-D nano-manipulator is the repulsive force. So the fingers of the 3-D nano-manipulator can open by applying voltage from the tungsten probe to fingers. It was possible to control the finger opening of the 3-D nano-manipulator with about 0.5 nm/V. And a tungsten probe as a monopole electrode was connected with a commercial piezo manipulator to control the position of the 3-D nano-manipulator. This result indicates that highly accurate control of the 3-D nano-manipulator can be carried out in the nano-factory. Furthermore, the manipulation of the glass ring as nano-parts was succeeded by using integrated manipulation system having the 3-D nano-manipulator in the vacuum chamber of FIB-CVD-system. These results indicate that our integrated manipulation system having the 3-D nano-manipulator is very useful tool to use in the nano-factory.