AVS 53rd International Symposium
    Exhibitor Workshop Wednesday Sessions
       Session EW-WeB

Paper EW-WeB1
Capacitance Diaphragm Vacuum Gauge with ASIC Electronics

Wednesday, November 15, 2006, 10:00 am, Room Exhibit Hall

Session: Exhibitor Workshop
Presenter: C. Berg, INFICON Ltd, Balzers, Liechtenstein
Authors: H. Hanselmann, INFICON Ltd, Balzers, Liechtenstein
R. Steiner, Hochschule für Technik Rapperswil, Switzerland
W. Hinn, Hochschule für Technik Rapperswil, Switzerland
M. Wüest, INFICON Ltd, Balzers, Liechtenstein
C. Berg, INFICON Ltd, Balzers, Liechtenstein
Correspondent: Click to Email
We have developed a capacitance diaphragm vacuum gauge with digital electronics using an application specific integrated circuit (ASIC). The ASIC incorporates a charge balance amplifier and a matching network of capacitances which allows tuning the compensation capacitance between 0 and 1023 fF by software command. The use of digital electronics including an ASIC has many advantages such as improved accuracy since temperature drift and nonlinearity are better compensated. Further, owing to the highly integrated design stray capacitances have been reduced and immunity to electromagnetic interference has been improved.