AVS 53rd International Symposium
    Exhibitor Workshop Tuesday Sessions
       Session EW-TuB

Paper EW-TuB2
Novel Mass Spectrometer Design with Intuitive User Interface for Helium Leak Detection

Tuesday, November 14, 2006, 10:20 am, Room Exhibit Hall

Session: Exhibitor Workshop
Presenter: J.D. Geist, Varian Vacuum Technologies Inc.
Authors: J.D. Geist, Varian Vacuum Technologies Inc.
P. Williams, Arizona State University
S.J. Yamartino, Varian Vacuum Technologies Inc.
J.H. Diep, Varian Vacuum Technologies Inc.
Correspondent: Click to Email
Mass spectrometers tuned to detect the lighter gasses have been used for many years to quantify leaks in various materials and joints. As the technology advanced, so did the desire to detect smaller leaks (<1 X 10@super -11@ Atm-cc/Sec). Efficient, contamination-free ion production and the ability to measure smaller ion current are key elements in the successful detection of smaller leaks. Through the use of selective ionization, the ion stream would contain a mix of ions that could effectively be discerned by the magnetic sector. By precisely shaping and positioning the electrodes in the ion source to maximize the ion beam cross section in the gap, the number of detected ions would be maximized. A novel approach to spectrometer design including an efficient, contamination-rejecting hot filament ion source, novel ion optical design and robust ion detection without the use of an electron multiplier will be presented. Mass spectrometers are often used by operators who have minimal training and who are not experts in leak detection. Many instruments overwhelm the users with an array of buttons, lights and user information. A new paradigm in the user interface experience now provides the user with the necessary functions while allowing access to the more advanced functions via a color touch screen. This touch screen interface has incorporated graphical functions that allow the brain to process the information faster than if the information was in written text. Additionally, since all information is embedded into the screen, functions that could not be provided using "hard buttons" are possible while providing a truly global model supporting multiple languages including English, French, Spanish, German, Chinese, Japanese and Korean.