AVS 53rd International Symposium
    Biomaterial Interfaces Tuesday Sessions
       Session BI2-TuM

Paper BI2-TuM1
The Fabrication and Characterization of Polycrystalline Silicon Active Layer Thin Film Transistor with Vertically Aligned Carbon Nanofiber

Tuesday, November 14, 2006, 8:00 am, Room 2014

Session: Biodiagnostic Innovation
Presenter: J.-W. Park, The University of Tennessee
Authors: J.-W. Park, The University of Tennessee
S.-J. Jun, The University of Tennessee
A.V. Melechko, Oak Ridge National Laboratory
T.E. McKnight, Oak Ridge National Laboratory
M.L. Simpson, Oak Ridge National Laboratory
P.D. Rack, The University of Tennessee
Correspondent: Click to Email
Thin film transistors (TFT) with vertically aligned carbon nanofibers (VACNF) are an attractive electronic switching device for nanoscale electroanalysis and delivering biological material into live cells. In our previous work, we have demonstrated an inverted back-channel-etched amorphous silicon TFT array integrated with VACNFs. To enhance the device performance, we have explored a polycrystalline silicon active and n+ contact layer with a standard top-gate structure. For the current device, source/drain and gate metals and gate dielectric thin films were rf magnetron sputter deposited. The Polycrystalline active layer and n+ contact layers were deposited by low pressure chemical vapor deposition (LPCVD). We have examined several enhanced crystallization strategies including stress induced crystallization (SIC) using dielectric caps and metal induced crystallization (MIC). The silicon films have been characterized by x-ray diffraction, scanning electron microscopy, and Raman spectroscopy. In this presentation, we will demonstrate the process flow of the staggered structured polycrystalline TFTs and the nanofiber integration scheme. The electrical characteristics of the transistor will be discussed and correlated to the silicon active layer crystallization. Furthermore, we will demonstrate the electrochemical characteristics of the TFT addressed array in various biological electrolyte solutions.