AVS 52nd International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuM

Paper VT-TuM9
Progress Towards User Oriented Vacuum Pressure Measurement

Tuesday, November 1, 2005, 11:00 am, Room 200

Session: Total and Partial Pressure Gauging
Presenter: M. Wuest, INFICON Ltd., Liechtenstein
Authors: M. Wuest, INFICON Ltd., Liechtenstein
R. Stocker, INFICON Ltd., Liechtenstein
Correspondent: Click to Email
Since the beginning of vacuum measurements in the days of Torricelli, Pascal and von Guericke we have made a lot of progress in vacuum measurement. Measurement of total pressure in vacuum systems is characterized by an extremely large measurement range (> 14 decades) and the use of rather intransparent measurement principles such as heat conductivity of the gas, gas friction or ionization of the gas. This makes the measurement of the total pressure for the innocent user quite tricky as environmental parameters such as gas species, temperature, contamination or operating parameters must be considered. What efforts have been made in the past and what can be done in the future to provide the common user with simple to operate, accurate and reliable pressure gauges?