AVS 52nd International Symposium
    Surface Science Tuesday Sessions
       Session SS-TuP

Paper SS-TuP8
Surface Nitridation of Terphenyl Methane Thiol Self-assembled Monolayer Using N@sub 2@ Neutral Beam Process

Tuesday, November 1, 2005, 4:00 pm, Room Exhibit Hall C&D

Session: Surface Science Poster Session
Presenter: Y. Ishikawa, Tohoku University, Japan
Authors: Y. Ishikawa, Tohoku University, Japan
T. Ishida, AIST, Japan
S. Samukawa, Tohoku University, Japan
Correspondent: Click to Email
To realize the future molecular scale devices, a fine surface modification method is quite important for controlling surface properties of organic molecules, such as the electric properties. Generally, the plasma processes were widely used to modify the surface for not only semiconductor devices but also polymer surface. However, for the surface modification of organic monolayers that can be utilize molecular scale device, the plasma processes cannot be used because of radiation of VUV, UV photons and charged particles from plasma to surface. Namely, the organic monolayers are considered to be broken due to radiation of these particles. To eliminate these radiation damages, we have already proposed the neutral beam process.@footnote 1,2@ This process could perfectly prevent the charged particles and ultraviolet photons to the surface and only the low energy neutral beam (accelerated atom and molecular beam) were irradiated to the substrates. In this paper, the pulse-time-modulated (TM) N@sub 2@ beam irradiation@footnote 1@ was investigated to control the surface nitridation of terphenyl methane thiol self-assembled monolayer (TP1-SAM).@footnote 3,4@ The N@sub 2@ neutral beam irradiation was modulated at a few tens microseconds to control the degree of surface nitridation. By using the novel modification method, we investigated the surface nitridation of TP1-SAM with maintaining the bulk structure. After the beam irradiation, we evaluated the amount of surface nitridation using the x-ray photoelectron spectroscopy. We found that the TM N@sub 2@ beam could precisely control the surface nitridation of TP1-SAM by changing the beam modulation period. @FootnoteText@ @footnote 1@ S. Samukawa et al.: J. Vac. Sci. Tech., A22, 245 (2004)@footnote 2@ Y. Ishikawa et al.: AVS 51st international symposium, PS+BI-FrM9 (2004)@footnote 3@ T. Ishida et al.: Langmuir, 18, 83 (2002)@footnote 4@ T. Ishida et. al., Langmuir, 18, 10499 (2002).