AVS 52nd International Symposium
    Surface Science Tuesday Sessions
       Session SS-TuP

Paper SS-TuP16
Adsorption and Dissociation Studies of Tri-ethylgermane on the Si(100) Surface

Tuesday, November 1, 2005, 4:00 pm, Room Exhibit Hall C&D

Session: Surface Science Poster Session
Presenter: A. Brickman, Bradley University
Authors: A. Brickman, Bradley University
P. Petrany, Bradley University
J. Lozano, Bradley University
J.H. Craig, Jr., Bradley University
P.W. Wang, Bradley University
Correspondent: Click to Email
Adsorption of tri-ethylgermane (TEG) on the Si(100) surface has been studied using temperature programmed desorption (TPD), electron stimulated desorption (ESD) in a time-of-flight mode, and high resolution energy loss spectroscopy (HREELS). Evidence for a beta-hydrogen elimination process will be presented in desorption spectra. Electron driven dissociation effects on the adsorbed TEG layer will be presented. The extent to which germanium is deposited on the Si(100) surface subsequent to TEG dissociation will also be discussed as characterized by X-ray photoelectron spectroscopy (XPS).