AVS 52nd International Symposium
    Surface Science Monday Sessions
       Session SS-MoP

Paper SS-MoP16
Growth and Oxidation of Ultrathin Films of Zirconium on the Au(111) Surface

Monday, October 31, 2005, 5:00 pm, Room Exhibit Hall C&D

Session: Surface Science Poster Session
Presenter: A.J. Slavin, Trent University, Canada
Authors: T.J.Z. Stock, Queen's University, Canada
A.J. Slavin, Trent University, Canada
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The growth and oxidation of ultrathin zirconium films (to 5 atomic layers) on the gold(111) surface in ultrahigh vacuum have been studied as a function of substrate temperature and oxygen pressure. The oxide films are of interest as a possible replacement for SiO@sub2@ in the gate of field-effect transistors. The study has used Auger electron spectroscopy, electron energy-loss spectroscopy, low energy electron diffraction and work function measurements. The evolution of the chemical composition of the oxide layer has been followed using a high-stability quartz-crystal microbalance.@footnote 1@ @FootnoteText@ @footnote1@ L. Bouzidi, S.S. Narine, K.G. Stefanov and A.J. Slavin; A high-stability quartz-crystal microbalance for investigations in surface science. Rev. Sci. Instrum. 74, 3039-3044 (2003).