AVS 52nd International Symposium
    Advanced Surface Engineering Monday Sessions
       Session SE-MoA

Paper SE-MoA9
Towards Large Area Deposition of Cr@sub 2@AlC on Steel

Monday, October 31, 2005, 4:40 pm, Room 201

Session: MAX Phases: Nanolaminates and Nanomechanical Measurements
Presenter: J.M. Schneider, RWTH Aachen, Germany
Authors: C. Walter, RWTH Aachen, Germany
D.P. Sigumonrong, RWTH Aachen, Germany
T. El-Raghy, 3-One-2 LLC
J.M. Schneider, RWTH Aachen, Germany
Correspondent: Click to Email
Cr@sub 2@AlC belongs to the MAX phases, which are promising materials for protective coatings on steel due to their unique combination of properties like corrosion and oxidation resistance and damage tolerance. Here the deposition by magnetron sputtering of a Cr-Al-C compound target was investigated varying the substrate temperature and the substrate bias potential. It was found that the MAX phase structure is stable in a substrate temperature range between 850 and 450 °C. At lower substrate temperatures the structure of the film is X-ray amorphous. Varying the DC substrate bias potential between floating potential and 310 V, no significant influence on the film composition and structure was observed. A phase purity of more than 90 % MAX phase in the films was reached and the equilibrium volume measured by X-ray diffraction is in excellent agreement with our own ab initio calculations. The method discussed here may provide a pathway towards large area MAX phase deposition on steel.