AVS 52nd International Symposium
    Nanometer-Scale Science and Technology Thursday Sessions
       Session NS-ThA

Paper NS-ThA2
White Luminescence from Silica Glass Containing Nanocrystalline Silicon Prepared by RF Sputtering Technique

Thursday, November 3, 2005, 2:20 pm, Room 210

Session: Nano Processing
Presenter: K. Sato, Tokyo Denki University, Japan
Authors: K. Sato, Tokyo Denki University, Japan
Y. Sasaki, Tokyo Denki University, Japan
K. Hirakuri, Tokyo Denki University, Japan
Correspondent: Click to Email
Nanocrystalline silicon (nc-Si) is one of promising materials for application to light-related devices because it shows the particle size-depended luminescence. We previously obtained a red/green/blue luminescence from the nc-Si with various particle sizes. The white luminescence can be realized by the mixture of nc-Si which emits the red/green/blue light. In this paper, we report a fabrication technique of the silica glass containing red/green/blue luminescent nc-Si. Moreover, the luminescence property of the silica glass will be discussed. The silica glass containing nc-Si was formed by co-sputtering of Si chips/silicon dioxide (SiO@sub2@) targets and subsequently annealing at high temperature. The particle size of nc-Si was varied from 1.9 nm up to 3.0 nm by changing the deposition conditions such as radio frequency power and gas pressure in order to obtain red/green/blue luminescence from the nc-Si. The sample was evaluated by using a photoluminescence (PL) measurement. The silica glass containing nc-Si showed a broad PL spectrum with a peak at 460 nm (blue light), 550 nm (green light) and 800 nm (red light). This is due to the existence of nc-Si in which the particle size differs, i.e., the nc-Si with particle size of 1.9 nm, 2.2 nm and 3.0 nm exhibits blue, green and red luminescence, respectively. When the silica glass was irradiated by using a xenon lamp with an optical band-pass filter of 313 nm, the luminescence color from the silica glass was a white light. The white luminescence could be distinctly seen by the naked eye under room illumination.