AVS 52nd International Symposium
    Nanometer-Scale Science and Technology Friday Sessions
       Session NS-FrM

Paper NS-FrM1
Precise Placement of a Multi-Wall Carbon Nanotube using Nano Manipulator in SEM

Friday, November 4, 2005, 8:20 am, Room 210

Session: Nanotube Processing and Properties
Presenter: H. Abe, AIST, Japan
Authors: H. Abe, AIST, Japan
M. Tanaka, AIST, Japan
M. Horikawa, AIST, Japan
Y. Naitoh, AIST, Japan
T. Shimizu, AIST, Japan
Correspondent: Click to Email
There have been many studies for realizing electric devices using carbon nanotubes (CNTs). Particularly a variety of growth methods have been developed in order to control the diameter and the electric properties. In addition, we have thought that it is important to place precisely a CNT onto the designated position and make electrically and mechanically reliable contacts between CNT and electrodes for the realization electric circuit using CNT. From now, we have manipulated a multi-wall CNT (MWNT) and fabricated a MWNT tip for high-resolution SPM measurement using specially designed SEM manipulator. Then we developed several bonding methods by melting low melting point alloy and TiNi nano particles, whose bonding showed good conductivity of several 10k@ohm@ and mechanical strength of more than 2GPa. In addition to the techniques, we have tried to fabricate a bridge structure using a MWNT in the SEM manipulator. Then we succeeded in bridging a MWNT between electrodes whose distance is from 1µm to 4µm. This technique enables us to control the attaching position of less than 50nmx50nm and to float or touch MWNT from the substrate. We could really bridge a MWNT by floating between thermal heater of 300nm and thermal bath for precise thermal conductivity measurement of a single MWNT. We have thought that this technique could be applied to other nanotubesâ?T bridge structure fabrication and their physical property. The way of fabricating a MWNT bridge structure will be shown using video file in detail in our presentation.