AVS 52nd International Symposium
    Magnetic Interfaces and Nanostructures Thursday Sessions
       Session MI+MS+NS-ThM

Invited Paper MI+MS+NS-ThM3
Nanoimprint Technologies for Magnetic Recording Media

Thursday, November 3, 2005, 9:00 am, Room 204

Session: Advanced Magnetic Storage and Manufacturing Processes
Presenter: C. Haginoya, Hitachi Ltd., Japan
Authors: T. Ando, Hitachi Ltd., Japan
C. Haginoya, Hitachi Ltd., Japan
K. Kuwabara, Hitachi Ltd., Japan
M. Ogino, Hitachi Ltd., Japan
K. Ohashi, Hitachi Ltd., Japan
A. Miyauchi, Hitachi Ltd., Japan
Correspondent: Click to Email
The discrete-track and patterned media have been developed as future magnetic recording media.@footnote 1,2,3@ Nano-scale patterns are formed on the disk surface of these media. The fine patterning technologies are required for producing the patterned disks. The nanoimprint technology is attractive for the fabrication of nano-scale structures in view of cost and mass production. There are two main types of the nanoimprint technologies. One is the thermal nanoimprint technology that fine structures are formed on thermoplastic polymer layer. Another is the photo nanoimprint technology that ultra-fine structures are formed on photo-curable polymer layer. There are several key points for media application such as pattern formation area, resolution, precise control of pattern transfer, lifetime of nano-mold, alignment and so on. The pattern formation area is important for producing patterned disks. We developed a thermal nanoimprint machine that has the auto-parallel system, two step pressure system and so on. The machine enabled us to imprint fine dots on a 300 mm diameter Si wafer using a 300 mm diameter mold. The pattern formation area is large enough to produce the 65 mm diameter patterned disks. The fine resolution is required for high recording density. Austin et al. formed 6 nm half-pitch structure using supperlattice stamper,@footnote 4@ and this resolution seems enough for Tbpsi storage era. D. Wachenschwanz et al.@footnote 1@ and Y. Soeno et al.@footnote 3@ evaluated write/read performance of the discrete-track media that the grooves and servo patterns were formed by using thermal nanoimprint and etching processes. Nanoimprint is promising way for discrete-track and patterned media. @FootnoteText@@footnote 1@ D. Wachenschwanz et al., INTERMAG 2005, no. BB02 @footnote 2@ B.D. Terris et al., INTERMAG 2005, no. BB03 @footnote 3@ Y. Soeno et al., INTERMAG 2005, no. FR04 @footnote 4@ M. D. Austin et al., 3rd Conf. on Nanoimprint Nanoprint Technology 2004, no. III.2