Active microelectronic arrays which have been developed for genomic research and DNA diagnostic applications may also have potential for nanofabrication applications. These microarray devices are able to create reconfigurable electric field transport geometries on their surface which allows charged reagent and analyte molecules (DNA, RNA, oligonucleotide probes, amplicons antibodies, proteins, enzymes, nanoparticles and micron sized semiconductor devices) to be moved to or from any of the microscopic test sites on the device surface. These microelectronic array devices have the potential for many nanofabrication applications, including the directed self-assembly of molecular, nanoscale and microscale components into more complex 2D and 3D nanostructures and for creating higher-order mechanisms. This type of electric field assisted self-assembly using active microelectronic arrays is also being investigated as a method to carry out the selective functionalization of nanocomponents with high precision.