AVS 52nd International Symposium
    Applied Surface Science Tuesday Sessions
       Session AS+BI-TuM

Paper AS+BI-TuM6
Measuring the Thickness of Organic/Polymer/Bio Films on Glass Substrates using Spectroscopic Ellipsometry

Tuesday, November 1, 2005, 10:00 am, Room 206

Session: Surface Characterization of Organic and Biological Systems
Presenter: H.G. Tompkins, J. A. Woollam Co., Inc.
Authors: H.G. Tompkins, J. A. Woollam Co., Inc.
T. Tiwald, J. A. Woollam Co., Inc.
C. Bungay, J. A. Woollam Co., Inc.
A.E. Hooper, Motorola, Inc.
Correspondent: Click to Email
In this work we discuss a method of determining film thickness for film/substrate combination where the index of refraction of the film and substrate in the transparent spectral regions are almost identical. Common examples of this situation are organic/polymer/biological films on glass substrates. IR ellipsometry is used and we use weight gain to provide some necessary additional information for determining the optical functions for the film material. The spectral regions of strong molecular vibrations are then used for determining film thickness.