AVS 51st International Symposium
    Thin Films Tuesday Sessions

Session TF2-TuM
ALD and Applications

Tuesday, November 16, 2004, 8:20 am, Room 303C
Moderator: H. Kim, IBM Research


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Click a paper to see the details. Presenters are shown in bold type.

10:20am TF2-TuM7
Atomic Layer Deposition of Tungsten Disulphide Solid Lubricant Coatings
T.M. Mayer, T.W. Scharf, S.V. Prasad, R.S. Goeke, M.T. Dugger, Sandia National Laboratories
10:40am TF2-TuM8
Molybdenum Atomic Layer Deposition Using MoF@sub 6@ and Si@sub 2@H@sub 6@
G.B. Rayner, Jr., S.M. George, University of Colorado
11:00am TF2-TuM9
Atomic Layer Deposition for the Conformal Coating of Nanoporous Materials
J.W. Elam, G. Xiong, C.Y. Han, J.P. Birrell, G.A. Willing, H.H. Wang, J.N. Hryn, M.J. Pellin, Argonne National Laboratory
11:20am TF2-TuM10
High Reflectivity X-Ray Mirrors from W/Al@sub 2@O@sub 3@ Nanolaminates Fabricated by Atomic Layer Deposition
F.H. Fabreguette, Z.A. Sechrist, R.A. Wind, S.M. George, University of Colorado
11:40am TF2-TuM11
Atomic Layer Deposition of Nickel Oxide Films Using Ni(dmamp)@sub 2@ and Water
T.S. Yang, W. Cho, M. Kim, K.-S. An, T.-M. Chung, C.G. Kim, Y. Kim, Korea Research Institute of Chemical Technology