AVS 51st International Symposium
    Advanced Surface Engineering Monday Sessions

Session SE-MoA
Structure Control of Hard Coatings in Sputtering Processes

Monday, November 15, 2004, 2:00 pm, Room 303D
Moderator: A.A. Voevodin, Air Force Research Laboratory


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Click a paper to see the details. Presenters are shown in bold type.

2:00pm SE-MoA1 Invited Paper
Control of Nanostructure Evolution in Metastable Transition Metal Nitride Layers using High-Flux, Low-Energy Ion Irradiation during Growth
I. Petrov, University of Illinois
2:40pm SE-MoA3
Investigation of the Solubility in (M@sub x@M'@sub 2-x@)AlC (M and M' = Ti, V, Cr) as well as the Cr-Al-C System
J.M. Schneider, D. Music, Z. Sun, R. Mertens, RWTH Aachen, Germany, R. Ahuja, Uppsala University, Sweden
3:00pm SE-MoA4
Growth and Characterization of New Epitaxial MAX-Phase Thin Films from the Ti@sub n+1@(Si, Ge)C@sub n@ Systems by Magnetron Sputtering
H. Högberg, J. Emmerlich, Linköping University, Sweden, J.-P. Palmquist, Kanthal AB, Sweden, P. Eklund, Linköping University, Sweden, O. Wilhelmssson, Uppsala University, Sweden, L. Hultman, Linköping University, Sweden, U. Jansson, Uppsala University, Sweden
3:20pm SE-MoA5
Epitaxial Growth of B1-NaCl-Structure HfN@sub x@ Layers on MgO(001) by Ultrahigh Vacuum Magnetron Sputter Deposition
H.-S. Seo, T.-Y. Lee, J.G. Wen, University of Illinois, D. Gall, Rensselaer Polytechnic Institute, I. Petrov, J.E. Greene, University of Illinois
3:40pm SE-MoA6
Surface Morphological Evolution of Epitaxial CrN(001) Layers
J.R. Lynch, J. D'Arcy-Gall, S.V. Kesapragada, D. Gall, Rensselaer Polytechnic Institute
4:00pm SE-MoA7
Stress Reduction in Sputter Deposited Tungsten Films Using Nanostructured Compliant Layers by High Working-Gas Pressures
T. Karabacak, J.J. Senkevich, G.-C. Wang, T.-M. Lu, Rensselaer Polytechnic Institute
4:20pm SE-MoA8
High Powered Pulsed Magnetron Sputtering of Metallic Films in Ar, Ne, and He Plasmas
S.L. Rohde, J. Li, D.M. Mihut, University of Nebraska-Lincoln
4:40pm SE-MoA9
The Dominance of Oxygen in Two-Gas Reactive Sputtering of Oxynitride Films
W.D. Sproul, D.C. Carter, D.J. Christie, Advanced Energy Industries, Inc.
5:00pm SE-MoA10
Ion Assisted Deposition of Zirconium Nitride using Balanced and Unbalanced Magnetron Sputtering
S. Guruvenket, Indian Institute of Science, India