| AVS 51st International Symposium | |
| Exhibitor Workshop | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 12:20pm | EW-TuL2 Residual Gas and Improved Pressure Control Resolution using a Cryocooled Water-Pumping Throttle Valve H. Grover, MeiVac Inc., N. GurArye, Ricor |
| 1:00pm | EW-TuL4 A Shuttle System for Rapidly Transfering Components Into and Out of a Vacuum Chamber R.E. Trillwood, Electron Beam Engineering Inc. |
| 1:20pm | EW-TuL5 Triple Gauge, A New Combination Vacuum Gauge M. Wuest, R. Enderes, U. Waelchli, INFICON Ltd, Liechtenstein |
| 1:40pm | EW-TuL6 Impact of Chamber Matching and Process Capability Through Flow Measurement and Adjustment S.A. Tison, D. Leet, C. Adcock, S. Lu, Mykrolis Corporation |