AVS 51st International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuP

Paper VT-TuP13
A Compact UHV-compatible Microprober with a Variable-Temperature Sample Stage

Tuesday, November 16, 2004, 4:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: H. Bando, National Institute of Advanced Industrial Science and Technology, Japan
Authors: H. Bando, National Institute of Advanced Industrial Science and Technology, Japan
Y. Aiura, National Institute of Advanced Industrial Science and Technology, Japan
A. Urata, International Servo Data Corp., Japan
I. Konishi, Ibaraki University, Japan
Y. Nishihara, Iaraki University, Japan
Correspondent: Click to Email
A compact ultra-high-vacuum-compatible microprober with a variable-temperature sample stage, which is suitable for in situ surface conductivity measurements, is presented. The equipment fits in a space of 300 mm x 300 mm x 100 mm. The vacuum chamber consists of a CF114 nipple with four CF70 and four CF34 ports. Each of four microprobes is position-controlled by a 3D stage made of stainless steel placed outside of the chamber through a CF34-based wobble stick. The bellows of the wobble sticks are of small diameter, allowing use of less-robust 3D stages. A variable-temperature sample stage is fixed symmetrically at the center of the chamber to minimize the thermal drift.