AVS 51st International Symposium
    Nanometer-scale Science and Technology Tuesday Sessions
       Session NS-TuP

Paper NS-TuP1
Electrostatic Potential and Charge Domain Mapping of Samples by a Large Range Scanning Probe Microscope.

Tuesday, November 16, 2004, 4:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: Y.D. Park, Seoul National University, South Korea
Authors: Y.D. Park, Seoul National University, South Korea
J. Lee, Seoul National University, South Korea
S. Lee, Seoul National University, South Korea
Y.S. Cho, Seoul National University, South Korea
H. Shin, Seoul National University, South Korea
Y. Kuk, Seoul National University, South Korea
Correspondent: Click to Email
A large range scanning probe microscope was constructed, with a new beam reflection structure. Z scanner was separated from X-Y scanner for fast scanning of massive samples. A high precision (~100 nm) X-Y stepper was used to scan samples over a large area. Double reflection mirrors are used to avoid z positional errors caused by laser beam path. The nanowires and carbon nanotubes are imaged without any distortion on electrode-patterned Si wafer. The scanning range can be varied from tens of nanometer to tens of micrometer with this microscope. The electrostatic potential mapping over many nanowires and the surface charge domain of ferroelectric samples will be given for examples.