AVS 51st International Symposium
    Biomaterial Interfaces Monday Sessions
       Session BI-MoP

Paper BI-MoP2
An Application of Microcantilever for Biosensor using Piezoresistivity

Monday, November 15, 2004, 5:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: K.H. Na, Myongji University, Korea
Authors: K.H. Na, Myongji University, Korea
C.J. Kang, Myongji University, Korea
Y.S. Kim, Myongji University, Korea
Correspondent: Click to Email
A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique that allows a simple fabrication procedure and a low cost sensor. A microcantilever integrated with piezoresistive readout enables sensing even for non-transparent liquids such as blood and miniaturizing the size of biosensor compared with optical readout. Adsorptions of bio-chemical species on a functionalised surface of a microcantilever will cause surface stress. This makes microcantilever bending and results in the change of the resistance of piezoresistor in the microcantilever. The structural layer of the microcantilever is fabricated with LPCVD silicon nitride film and the sacrificial layer is LPCVD polysilicon film. The cystamine terminated with thiol was covalently immobilized on the gold-coated side of the microcantilever. The immobilization process was characterized by measurement of the microcantilever deflection in real time monitoring. We are going to present a cantilever deflection after a formation of cystamine/glutaraldehyde/protein-A/anti-protein-A composite layers and to measure a limited resolution of the cantilever-based biosensor for a concentration of biomolecule.