| AVS 50th International Symposium | |
| Workshop on Sputtering | Sunday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 10:00am | WS-SuM1 Invited Paper Basic Understanding of Reactive Sputtering Processes S. Berg, T. Nyberg, Uppsala University, Sweden |
| 11:00am | WS-SuM4 Invited Paper Shallow Implantation as a Mechanism for Target Poisoning in Reactive Sputtering R. De Gryse, D. Depla, J. Haemers, G. Buyle, University Ghent, Belgium |
| 11:40am | WS-SuM6 Invited Paper Modeling of Sputtering Equipment and Processes as an Engineering Tool: Building a Virtual Sputter Tool J.C.S. Kools, Veeco Instruments |