AVS 50th International Symposium | |
Workshop on Sputtering | Sunday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
1:30pm | WS-SuA1 Invited Paper Control of Microstructural Evolution during Film Growth I. Petrov, University of Illinois at Urbana-Champaign |
2:30pm | WS-SuA4 Invited Paper Advances in Sputtering Power Supply Technology R. Scholl, Advanced Energy Industries, Inc. |
3:30pm | WS-SuA7 Invited Paper Cathodic Arcs and High Power Pulsed Magnetron Sputtering: A Comparison of Plasma Formation and Thin Film Deposition A. Anders, Lawrence Berkeley Laboratory |
4:30pm | WS-SuA10 Invited Paper Progress and Prospects for Ionized Physical Vapor Deposition J. Hopwood, Northeastern University |