AVS 50th International Symposium
    Workshop on Sputtering Sunday Sessions

Session WS-SuA
Workshop on Sputtering (Afternoon Session)

Sunday, November 2, 2003, 1:30 pm, Room Constellation C, Hyatt Regency
Moderator: W.D. Sproul, Advanced Energy Industries, Inc.


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Click a paper to see the details. Presenters are shown in bold type.

1:30pm WS-SuA1 Invited Paper
Control of Microstructural Evolution during Film Growth
I. Petrov, University of Illinois at Urbana-Champaign
2:30pm WS-SuA4 Invited Paper
Advances in Sputtering Power Supply Technology
R. Scholl, Advanced Energy Industries, Inc.
3:30pm WS-SuA7 Invited Paper
Cathodic Arcs and High Power Pulsed Magnetron Sputtering: A Comparison of Plasma Formation and Thin Film Deposition
A. Anders, Lawrence Berkeley Laboratory
4:30pm WS-SuA10 Invited Paper
Progress and Prospects for Ionized Physical Vapor Deposition
J. Hopwood, Northeastern University