AVS 50th International Symposium
    Vacuum Technology Wednesday Sessions
       Session VT-WeP

Paper VT-WeP5
The Effect of Environmental Humidity on Thermal Outgassing Rate

Wednesday, November 5, 2003, 11:00 am, Room Hall A-C

Session: Poster Session
Presenter: C.-K. Chan, National Synchrotron Radiation Research Center, Taiwan
Authors: C.-K. Chan, National Synchrotron Radiation Research Center, Taiwan
Y.-C. Ou, National Synchrotron Radiation Research Center, Taiwan
G.-Y. Hsiung, National Synchrotron Radiation Research Center, Taiwan
J.-R. Chen, National Synchrotron Radiation Research Center, Taiwan
Correspondent: Click to Email
This work investigates how humidity of environment affects thermal outgassing rate of an A6063 aluminum alloy chamber. The throughput method was used to measure the thermal outgassing rate of a test chamber exposed to the air with different moistures. The aluminum chamber was then exposed to dehumidified-air under an airshower located at downstream of an oilless compressor. Experimental results indicate that by controlling the humidity around the chamber adequately, the thermal outgassing rate achieved without baking is comparable to that after in-situ bakeout.