AVS 50th International Symposium
    Vacuum Technology Wednesday Sessions
       Session VT-WeP

Paper VT-WeP4
Photon Stimulated Desorption Study for a NEG-Coated Insertion Device Vacuum Chamber for TLS

Wednesday, November 5, 2003, 11:00 am, Room Hall A-C

Session: Poster Session
Presenter: G.-Y. Hsiung, National Synchrotron Radiation Research Center, Taiwan
Authors: G.-Y. Hsiung, National Synchrotron Radiation Research Center, Taiwan
J.-C. Lee, National Synchrotron Radiation Research Center, Taiwan
J.-R. Chen, National Synchrotron Radiation Research Center and NTHU, Taiwan
Correspondent: Click to Email
An aluminum alloy vacuum chamber, 4.6 m in length, for a narrow gap insertion device at Taiwan Light Source (TLS) is coated with the Zr-Ti-V Non-Evaporable Getter (NEG) film on the inner surface. The chamber, after NEG-coating, was installed in the 19B(PSD) beam line at TLS for synchrotron radiation exposure measurement. The yield of photon stimulated desorption (PSD), measured by the throughput method, illustrates a lower value but slowly decayed curve at the earlier exposure beam dose. The desorbed gas species, measured by a quadrupole mass spectrometer, contain the CH@sub 4@, H@sub 2@, CO, CO@sub 2@, as well as Ar. The behavior of pumping and desorption from the NEG coated surface will be discussed.