AVS 50th International Symposium
    Vacuum Technology Wednesday Sessions
       Session VT-WeM

Paper VT-WeM6
Development of a Low Cost Cylindrical Magnetron for Coating Long Vacuum Vessels*

Wednesday, November 5, 2003, 10:00 am, Room 323

Session: Dynamic Vacuum Systems
Presenter: R. Todd, Brookhaven National Laboratory
Authors: P. He, Brookhaven National Laboratory
H.C. Hseuh, Brookhaven National Laboratory
M. Mapes, Brookhaven National Laboratory
R. Todd, Brookhaven National Laboratory
D. Weiss, Brookhaven National Laboratory
Correspondent: Click to Email
The 2 MW US Spallation Neutron Source (SNS) includes a 248m accumulator ring that requires a 100 nm coating of TiN to reduce the secondary electron yield (SEY) of the vacuum chamber walls. Brookhaven National Laboratory (BNL) has developed a low cost cylindrical magnetron target capable of coating the wide variety of chamber geometries found in the SNS accumulator ring. Production chambers with lengths of 5m and diameters of 29cm have been successfully coated. This target is capable of reactive sputtering through the use of a gas introduction tube, and can easily be adapted for a wide variety of lengths. The magnetic field is such that primary electron trapping is longitudinally uniform, which results in excellent discharge characteristics. This method has also been used to successfully coat a Cu/TiN multilayer on production ceramic injection kicker pipes of SNS. Coating properties were analyzed with auger electron spectroscopy and scanning electron microscopy, and will be presented herein. Special emphasis will be given to the various coating configurations of production chambers and equipment used. *Work performed under Contract Number DE-AC05-00OR22725 with the auspicious of the U.S. Department of Energy.