AVS 50th International Symposium
    Vacuum Technology Wednesday Sessions
       Session VT-WeM

Invited Paper VT-WeM3
Quartz Capillary Gas Flow Meters

Wednesday, November 5, 2003, 9:00 am, Room 323

Session: Dynamic Vacuum Systems
Presenter: R.F. Berg, National Institute of Standards and Technology
Correspondent: Click to Email

The flow rate of a gas through a laminar flow impedance can be inferred from the pressures at the entrance and exit of the impedance. If the hydrodynamic model of the meter is well understood, one calibration allows such a meter to be used over a wide range of pressures and flow rates and for a wide variety of gases. The calibration is required to determine the impedance's effective geometry. This talk describes measurements on five gases with a laminar flow meter whose impedances were constructed from quartz capillary manufactured for gas chromatography. The meter is presently used as a transfer standard for flows from 1 to 1000 micromol/s (about 1 to 1000 sccm). Two additional uses are discussed. The first use relies on the circularity and uniformity of the capillary's cross-section. A determination of the average capillary radius by weighing (sensitive to radius^2) will be close to the effective radius for flow (sensitive to radius^4). This would allow the meter to be used as a primary flow standard. The second use is for gas flow measurements for primary vacuum standards. This requires extending the model to handle exit pressures less than 100 Pa.