AVS 50th International Symposium
    Thin Films Friday Sessions
       Session TF-FrM

Paper TF-FrM10
Hydrogenated Carbon Films and Sulfur Stabilization: Synthesis and Tribiological Characterization

Friday, November 7, 2003, 11:20 am, Room 329

Session: Mechanical Properties of Thin Films
Presenter: C.A. Freyman, Northwestern University
Authors: C.A. Freyman, Northwestern University
Y.H. Yu, Northwestern University
Y.W. Chung, Northwestern University
Correspondent: Click to Email
Hydrogenated carbon films have been deposited on Si substrates and stainless steel ball bearings by magnetron sputtering. Hydrogen concentration was controlled by the percentage of hydrogen in the Ar/H@sub 2@ mixture. The friction coefficient showed a strong dependence on both the hydrogen content of the precursor gas and the relative humidity during testing. Twenty-five percent of hydrogen in the precursor gas produced the lowest frictional coefficient (0.01) at the lowest relative humidity measured (5%). Sulfur was incorporated into the film via the introduction of hydrogen sulphide in the precursor gas. Here, we attempted to use sulphur to make the surface hydrophobic and hence minimize the relative humidity effect. Hardness, friction and sensitivity towards the environment will be investigated as a function of deposition parameters.