AVS 50th International Symposium
    Surface Science Tuesday Sessions
       Session SS-TuP

Paper SS-TuP7
Patterning and Selective Metallization of Polymer Films Bearing Chloromethylphenyl Groups

Tuesday, November 4, 2003, 5:30 pm, Room Hall A-C

Session: Poster Session
Presenter: W.J. Dressick, Naval Research Laboratory
Authors: W.J. Dressick, Naval Research Laboratory
M.-S. Chen, Naval Research Laboratory
T.L. Schull, Naval Research Laboratory
S.L. Brandow, Naval Research Laboratory
Correspondent: Click to Email
The ability to spatially control polymer surface reactivity without affecting bulk properties for the selective deposition of materials, such as metals, ceramics, or other chemical and biological species, is critically important for microelectronics, optics, and sensor technologies. We have been investigating the top-surface imaging of thin polymer films containing surface chloromethylphenyl groups to address this challenge. Recently we demonstrated that solvent-templated nanocavities could be formed in chloromethylphenyl-based films that are capable of non-covalently binding reactive adsorbates. Exclusion of the adsorbate from aqueous solution and binding within the film nanocavity are driven by favorable hydrophobic interactions between the adsorbate and the aromatic residues of the polymer film. Spatial control of adsorbate entrapment is demonstrated using a variety of patterning tools (e.g., microcontact printing, deep UV, proximity x-ray, high-energy e-beam, and low voltage scanning tunneling microscope) to selectively inhibit entrapment through chemical modification of the films or displacement of entrapped adsorbate from film nanocavities. Spatial control of adsorbate binding allows the subsequent selective deposition of Pd-based catalytic nanoparticles of controlled size for electroless metal deposition. Fabrication of nanoscale structures in metal with good control of feature critical dimensions is demonstrated. Details of the largely aqueous based process will be presented and factors contributing to feature critical dimensions and optimization of ligand physisorption will be discussed.