AVS 50th International Symposium
    Surface Science Tuesday Sessions
       Session SS-TuP

Paper SS-TuP5
Effect of Multidirection Ion Beam Treatment and Alignment Property of Nematic Liquid Crystal

Tuesday, November 4, 2003, 5:30 pm, Room Hall A-C

Session: Poster Session
Presenter: S.J. Rho, Yonsei University, South Korea
Authors: S.J. Rho, Yonsei University, South Korea
H.J. Ahn, Yonsei University, South Korea
K.C. Kim, Yonsei University, South Korea
H.K. Baik, Yonsei University, South Korea
J.Y. Hwang, Yonsei University, South Korea
Y.M. Jo, Yonsei University, South Korea
C.J. Park, Yonsei University, South Korea
D.S. Seo, Yonsei University, South Korea
K.M. Song, Konkuk University, South Korea
S.J. Lee, Kyungsung University, South Korea
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We have investigated the alignment properties of liquid crystals induced by multi- directional ion beam irradiation on the a-C:H flims. Ion beam treatment of alignment layer is the new method which does not contact with alignment layer and prevent from debris or electrostatic discharge. Amorphous carbon (a-C:H) films for alignment layer were deposited by remote plasma enhanced chemical vapor deposition and were modified by an Ar ion beam at an films. For the multi-domain of LCD, the direction of ion beam exposure was changed about 0deg, 90deg, 180deg, 270deg and at each step, ion beam is overlapped It is experimentally found that the aligning direction of the liquid crystal depend on the final irradiating direction of ion beam and by these results, we analyzed the structural transition of a-C:H layer after ion beam irradiation. Raman, IR, and AFM data were used for analysis of theses phenomena. Also we prove the merit of ion beam method, which decrease the masking step for multi-domain of LCD manufacturing.