AVS 50th International Symposium
    Advanced Surface Engineering Monday Sessions
       Session SE-MoM

Invited Paper SE-MoM3
Molecular-Scale Tribology in Model SAMs and Amorphous Carbon Films

Monday, November 3, 2003, 9:00 am, Room 323

Session: Modern Challenges in Surface Engineering
Presenter: J.A. Harrison, US Naval Academy
Authors: J.A. Harrison, US Naval Academy
G.M. Chateauneuf, US Naval Academy
P.T. Mikulski, US Naval Academy
G.T. Gao, US Naval Academy
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With the rapid development of MEMs and NEMs, protection of the surfaces of these devices has become an urgent issue. In recent years, much effort has been devoted to methods for passivating the surfaces of MEMs. Amorphous carbon films (a-C) and self-assembled monolayers (SAMs) are both possible candidates for the passivation and lubrication of MEMs. The fundamental problem associated with minimizing friction and wear mechanisms is to gain a better understanding of the underlying chemical and physical processes at the atomic scale. Over the past several years, we have done extensive molecular dynamics (MD) simulations that examine the compression and friction of model hydrocarbon SAMs attached to diamond and amorphous carbon films attached to diamond. Recently, compression and shear-induced polymerization have been modeled in unsaturated hydrocarbon films. The effects of polymerization on friction will be discussed. In addition, we have also done extensive simulations that analyze the structure and friction of a-C and a-CH films. These results will also be discussed. @FootnoteText@ **Supported by The Office of Naval Research & The Air Force Office of Scientific Research.