AVS 50th International Symposium
    Nanotubes Thursday Sessions
       Session NT-ThM

Paper NT-ThM5
Synthesis of Carbon Nanotube Array by Radio-frequency Plasma Enhanced Chemical Vapor Deposition for Field Emission Application

Thursday, November 6, 2003, 9:40 am, Room 317

Session: Nanotube Growth and Processing
Presenter: J. Wang, The College of William and Mary
Authors: J. Wang, The College of William and Mary
M. Zhu, The College of William and Mary
R.A. Outlaw, The College of William and Mary
X. Zhao, The College of William and Mary
N.D. Theodore, The College of William and Mary
D. Manos, The College of William and Mary
B.C. Holloway, The College of William and Mary
V.P. Mammana, International Technology Center
Correspondent: Click to Email
In this presentation we report on the synthesis, characterization, and applications of large periodic carbon nanotube arrays. A polystyrene and silica nanosphere lithography technique was used to create nickel catalyst arrays on silicon substrates. Nanotubes, with a diameter of about 50 nm, were synthesized on the nanodot arrays by radio-frequency plasma enhanced chemical vapor deposition (CVD) using an acetylene and hydrogen mixture. Scanning electron microscopy has been used to determine the density, height, and interspacing of the carbon nanotubes as a function of array patterning and deposition conditions. The suitability of such arrays for use in field emission devices is discussed within the framework of field emission electron spectroscopy, Kelvin probe and diode measurements.