AVS 50th International Symposium
    Nanometer Structures Tuesday Sessions
       Session NS-TuP

Paper NS-TuP24
Probe-Scanned Traces with Chemical Reversibility on Organosilane Self-Assembled Monolayer Surfaces

Tuesday, November 4, 2003, 5:30 pm, Room Hall A-C

Session: Poster Session
Presenter: N. Saito, Nagoya University, Japan
Authors: N. Saito, Nagoya University, Japan
S.L. Lee, Nagoya University, Japan
H. Sugimura, Nagoya University, Japan
O. Takai, Nagoya University, Japan
Correspondent: Click to Email
Amino-terminated self-assembled monolayers (SAMs) on silicon substrate have a potential as templates for biosensor or molecular devices. Since amino groups are able to link with target molecules such as deoxyribonucleic acid (DNA) and antibody-forming cell, many researchers had investigated amino-terminated SAMs. To fabricate components of future micro-devices, such templates must offer high chemical reactivity which is restricted to specific micro-regions. Thus, the amino-terminated regions must be prepared on given points of a substrate. Such a microstructure can be accomplished by maskless lithography techniques such as focused ion beam lithography and electron beam lithography. However, these lithography techniques cause a great deal of damage to the amino-terminated surface of a SAM due to the excessive energy applied. Considering this, we determined we had to develop a soft chemical lithography process for the reversible oxidation-reduction reaction of amino groups. Scanning probe lithography (SPL) is based on electrochemical theory and can be employed to realize such a soft process by controlling the applied potential. SPL had been applied in many cases, however, for the elimination of SAMs. In our present research, we have attempted, through chemical lithography, to produce amino-terminated regions on a sample surface without changing any other part of molecule. Amino-terminated SAM samples were prepared from p-aminophenyltrimethoxysilane though chemical vapor deposition. The amino-terminated surfaces were converted into nitroso-terminated surfaces at positive bias voltages. Moreover, the nitroso-terminated surfaces were reconverted into amino-terminated surfaces. The changes of functional groups on the surfaces were traced by Kelvin probe force Microscopy and atomic force microscopy.