AVS 50th International Symposium
    Nanometer Structures Tuesday Sessions
       Session NS-TuP

Paper NS-TuP11
On the Study of Growth Behavior of Carbonaceous Tips by Electron Beam Induced Deposition using Preprocessing Methods

Tuesday, November 4, 2003, 5:30 pm, Room Hall A-C

Session: Poster Session
Presenter: S.H. Kim, Korea Electronics Technology Institute
Authors: S.H. Kim, Korea Electronics Technology Institute
Y.J. Choi, Korea Electronics Technology Institute
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For the investigation of high aspect ratio structures with SPM, the cantilevers with very sharp and long tips are useful. The carbon nanotube(CNT) tips and electron beam deposited(EBD) tips are effective candidates for the high aspect ratio tips. Although EBD tips are duller than CNT tips, they have an advantage of simple fabrication process over the CNT tips. EBD tips can be simply fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump of the Scanning Electron Microscope(SEM).@footnote 1-2@ The height and the base diameter of the EBD tips can be controlled by adjusting the control parameters of the SEM. However, the EBD tips cannot grow over 1µm in the residual gas atmosphere. We could enhance the height of tips by dipping the catilever into the organic solvents which contain aromatic or aliphatic hydrocarbon, drying it in the vaccum chamber and irradiating electron beam. With this process, we could acquire the tip whose base diameter is 0.180µm and effective length is 3.18µm . In addition, we observed that the growth behavior of the tips are different in accordance with the species of the chemicals and we will discuss the effects of the organic solvents on the growth of the tips. @FootnoteText@ @footnote 1@ Albert Floch, Jordi Servat, J. Vac. Sci. Technol. B, Vol 14, No. 4 Jul/Aug (1996). @footnote 2@M.Wendel, H.Lorenz, and J.P.Kotthaus, Appl. Phys. Lett. 67(25) (1995).