AVS 50th International Symposium
    Nanometer Structures Thursday Sessions
       Session NS-ThM

Paper NS-ThM2
Combined Scanning Force Microscope and Mass Spectrometer

Thursday, November 6, 2003, 8:40 am, Room 308

Session: Advances in Scanning Probes
Presenter: A. Wetzel, University of Basel, Switzerland
Authors: A. Wetzel, University of Basel, Switzerland
D.-W. Lee, IBM Research, Zurich Research Laboratory, Switzerland
R. Bennewitz, University of Basel, Switzerland
M. Despont, IBM Research, Zurich Research Laboratory, Switzerland
P. Vettiger, IBM Research, Zurich Research Laboratory, Switzerland
Ch. Gerber, University of Basel, Swizterland
E. Meyer, University of Basel, Switzerland
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We have constructed a scanning force microscope in ultrahigh-vacuum where the tip position can be switched between the sample surface and a local electrode that serves as entrance for a time-of-flight mass spectrometer. Material shall be picked up at the surface and chemically identified in the mass spectrometer after field- induced desorption from the tip. Tip, force sensor, switch, and local electrode are integrated in one silicon device. We will describe the technical details, proof the concept of the device, and discuss the important requirements to the tip quality. Finally, we will present first experimental results obtained with the new instrument.