AVS 50th International Symposium
    Magnetic Interfaces and Nanostructures Wednesday Sessions
       Session MI-WeP

Paper MI-WeP7
Spin-polarized Scanning Tunneling Microscopy Study of Ferromagnetic Arrays Fabricated by In-situ Alumina Shadow Mask

Wednesday, November 5, 2003, 11:00 am, Room Hall A-C

Session: Poster Session
Presenter: J.H. Choi, CSNS and Seoul National University, Korea
Authors: J.H. Choi, CSNS and Seoul National University, Korea
T.-H. Kim, CSNS and Seoul National University, Korea
S.H. Kim, CSNS and Seoul National University, Korea
Y. Kuk, CSNS and Seoul National University, Korea
Correspondent: Click to Email
Spin-polarized scanning tunneling microscopy(SPSTM) can detect the local electron spin density of the sample surface in atomic resolution, so it has been used to study magnetic properties of ferromagnetic materials. However, SPSTM study of patterned nanomagnetic arrays has not been done because all the fabrication process of nanomagnetic arrays must be done in-situ in UHV chamber to avoid contamination problems. We fabricated a shadow mask for in-situ SPSTM study of nanomagnetic arrays on Si wafer. 500nm thick aluminum was thermally evaporated on Si wafer and indented by SiC mold to produce an ordered pore of porous alumina. The sample was electrochemically anodized in oxalic acid. After pore widening and removing barrier layer, we opened 5x5mm@super 2@ window on backside Si substrate by photolithography and etched Si wafer completely using deep silicon etch process until the aluminum layer was appeared. Fabricated shadow mask was mounted in front of Si substrate in UHV chamber. Fe was evaporated on a Si wafer through shadow mask, forming nanomagnetic arrays of 30-80nm dia. The magnetic properties of ferromagnetic arrays studied by SPSTM will be discussed.