AVS 50th International Symposium
    Biomaterial Interfaces Friday Sessions
       Session BI+PS-FrM

Paper BI+PS-FrM10
Deposition of Amine Containing Films from Hyperthermal Silazane and Allyl Amine Ions

Friday, November 7, 2003, 11:20 am, Room 318/319

Session: Plasma Methods for Bio-interfaces
Presenter: L. Hanley, University of Illinois at Chicago
Authors: A. Choukourov, Charles University, Czech Republic
H. Biederman, Charles University, Czech Republic
E. Fuoco, University of Illinois at Chicago
S. Tepavcevic, University of Illinois at Chicago
L. Hanley, University of Illinois at Chicago
Correspondent: Click to Email
Polyatomic ion deposition at ion impact energies below 200 eV is an effective method for the growth of thin organic films on polymer, metal, and semiconductor surfaces. We have previously shown that fluorocarbon and siloxane ions can be employed for the growth and modification of organic thin films on polymer, semiconductor, and metal surfaces.@footnote 1-3@ These films are often similar in chemical composition to plasma polymers, due at least in part the presence of large, hyperthermal positive ions in many plasmas. This work deposits beams of mass-selected 5 - 200 eV silazane and allyl amine ions onto aluminum and silicon substrates. Silazane and allyl amine ions are produced by electron impact ionization of 1,3-divinyltetramethyldisilazane and allyl amine, respectively. These ion-deposited films are analyzed by x-ray photoelectron spectroscopy (XPS) and atomic force microscopy. Chemical functionalization prior to XPS analysis permits the unique identification of primary and secondary amine groups. Secondary amine containing films are shown to form at low silazane ion energies whereas the higher ion energies lead to formation of more inorganic, silico-carbo-nitride-like films. Primary amines are produced by allyl amine ions at various energies. Films grown by allyl amine ion deposition are compared with those produced by plasma polymerization of allyl amine. Effects of film aging in air are also discussed. @FootnoteText@ @footnote 1@L. Hanley and S.B. Sinnott, Surf. Sci. 500, 500 (2002). @footnote 2@P.N. Brookes, S. Fraser, R.D. Short, L. Hanley, E. Fuoco, A. Roberts, and S. Hutton, J. Elec. Spect. Rel. Phenom. 121, 281 (2001).@footnote 3@E.R. Fuoco and L. Hanley, J. Appl. Phys. 92, 37 (2002).