AVS 49th International Symposium
    Vacuum Technology Wednesday Sessions

Session VT-WeM
Outgassing

Wednesday, November 6, 2002, 8:20 am, Room C-104
Moderator: L.A. Westerberg, The Svedberg Laboratory


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Click a paper to see the details. Presenters are shown in bold type.

8:20am VT-WeM1 Invited Paper
Influence of Thermal and Surface Treatments on the Outgassing Of Austenitic Stainless Steels Studied by Thermal and Electron Stimulated Desorption
C. Benvenuti, P. Chiggiato, G. Chuste, I. Wevers, CERN, Switzerland
9:00am VT-WeM3
Comparison of Outgassing Rates of Bare and TiN-coated Stainless Steel Vacuum Chambers*
P. He, H.C. Hseuh, M. Mapes, R. Todd, D. Weiss, D. Wilson, Brookhaven National Laboratory
9:20am VT-WeM4
Degassing of Static Expansion Vacuum Gauge Calibration Chamber
J. Setina, Institute of Metals and Technology, Slovenia
9:40am VT-WeM5
Organic Contaminants Adsorption Behavior on Silicon Wafer Surface Under Reduced Pressure
T. Hayashi, T. Kawaguchi, N. Tanahashi, Tohoku University, Japan, M. Saito, K. Suzuki, Tokyo Electron Ltd., Japan, Y. Wakayama, Taisei Corporation, Japan, Y. Shirai, T. Ohmi, Tohoku University, Japan
10:00am VT-WeM6
Study on Desorption of Carbonaceous Gas Molecules from Copper Surfaces under Electron Bombardment and the Surface Characterization
M. Nishiwaki, KEK, Japan, S. Kato, KEK & The Graduate University for Advanced Studies, Japan
10:20am VT-WeM7
Solubility and Diffusion of Hydrogen in Ordered Metals
P. Repa, L. Peksa, T. Gronych, R. Ulman, Charles University, Czech Republic