AVS 49th International Symposium | |
Vacuum Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
8:20am | VT-WeM1 Invited Paper Influence of Thermal and Surface Treatments on the Outgassing Of Austenitic Stainless Steels Studied by Thermal and Electron Stimulated Desorption C. Benvenuti, P. Chiggiato, G. Chuste, I. Wevers, CERN, Switzerland |
9:00am | VT-WeM3 Comparison of Outgassing Rates of Bare and TiN-coated Stainless Steel Vacuum Chambers* P. He, H.C. Hseuh, M. Mapes, R. Todd, D. Weiss, D. Wilson, Brookhaven National Laboratory |
9:20am | VT-WeM4 Degassing of Static Expansion Vacuum Gauge Calibration Chamber J. Setina, Institute of Metals and Technology, Slovenia |
9:40am | VT-WeM5 Organic Contaminants Adsorption Behavior on Silicon Wafer Surface Under Reduced Pressure T. Hayashi, T. Kawaguchi, N. Tanahashi, Tohoku University, Japan, M. Saito, K. Suzuki, Tokyo Electron Ltd., Japan, Y. Wakayama, Taisei Corporation, Japan, Y. Shirai, T. Ohmi, Tohoku University, Japan |
10:00am | VT-WeM6 Study on Desorption of Carbonaceous Gas Molecules from Copper Surfaces under Electron Bombardment and the Surface Characterization M. Nishiwaki, KEK, Japan, S. Kato, KEK & The Graduate University for Advanced Studies, Japan |
10:20am | VT-WeM7 Solubility and Diffusion of Hydrogen in Ordered Metals P. Repa, L. Peksa, T. Gronych, R. Ulman, Charles University, Czech Republic |