AVS 49th International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuM

Paper VT-TuM9
Modern Types of Getters for Novel Applications

Tuesday, November 5, 2002, 11:00 am, Room C-104

Session: Novel Vacuum Materials and Pumps, Including Getters
Presenter: L. Rosai, Saes Getters, Italy
Correspondent: Click to Email

Modern applications of gettering aimed to remove unwanted impurities and contaminants in vacuum and gas filled environments encompass new types of evacuated or gas filled devices, each requiring a tailor made solution in terms of gettering materials, geometry, process integration. In addition to the traditional types of getters in form of rings, porous pellets and coated strips, nowadays new configurations are available to meet the specific requirements of new applications: the getters can be prepared in form of very porous thin films sheets, coated in- situ as sputtered films, patterned on a semiconductor substrate, made in form of thin permeable bags filled with different materials each devoted to a specific gettering task, filling small capsules equipped with special mounting features. In these modern getters the so called activation process is no longer necessary thanks to special features of getter packaging and/or a natural activation occurring during device manufacturing. New types of getter pumps, not requiring substitution for many months or years are also available, for different applications in portable instruments, semiconductor, LCD and magnetic recording media manufacturing In some of these applications these new getter types are necessary not only for ensuring a long life to the device but also as a process aid during the manufacturing of the device itself .The vacuum and purity requirements of the most recent applications of getters will be illustrated. These will include: Vacuum Insulated Panels, Vacuum Pipes, Flywheels, Plasma Display Panels , Field Emission Displays, OLEDs, MEMS, Opto-electronic devices, Magnetic recording devices, Semiconductor and LCD production tools.