AVS 49th International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuM

Paper VT-TuM3
Vacuum System Design and Simulation Program for PCs

Tuesday, November 5, 2002, 9:00 am, Room C-104

Session: Novel Vacuum Materials and Pumps, Including Getters
Presenter: R.A. Langley, Oak Ridge Scientific Consultants
Authors: R.A. Langley, Oak Ridge Scientific Consultants
L.R. Baylor, Oak Ridge Scientific Consultants
P. LaMarche, Oak Ridge Scientific Consultants
Correspondent: Click to Email
A new integrated software package for Windows has been developed to design vacuum systems and to simulate existing vacuum systems. The package is modeled after earlier DOS based programs by Santeler.@footnote1,2@ The initial setup of the design calculation allows the choice of up to five parallel pumping modules on the vacuum chamber with the choice of up to six different gas types. At this stage, the primary pump for each module is chosen. Each pumping module is then separately addressed to choose the optimum secondary pump or pumps for that pumping module. Both circular and rectangular cross section tubing is allowed. Pumping speed data for many types of pumps and many sizes of pumps is maintained within the program and additional pumping speed data can also be input for use by the program. The calculation is based on a precision set of gas flow equations for all pressure conditions, i.e. molecular, transition, and viscous, and provides pumpdown and steady state data. True gas fractionation is calculated and gas flow for tubes of varying lengths, i.e. from an orifice to a long tube, can be calculated. Various examples of the use of the program will be presented. @FootnoteText@ @footnote 1@ Donald J. Santeler, Vacuum System Design, Donald J. Santeler Assoc. @footnote 2@ Donald J. Santeler, VSD-II Vacuum System Design, Donald J. Santeler Assoc.