AVS 49th International Symposium
    Surface Science Wednesday Sessions
       Session SS-WeP

Paper SS-WeP31
Contrast Mechanisms of Secondary Electron Images from Electron, Ion and X-Ray Excitation

Wednesday, November 6, 2002, 11:00 am, Room Exhibit Hall B2

Session: Surface Science Poster Session
Presenter: Y. Sakai, JEOL Ltd., Japan
Authors: Y. Sakai, JEOL Ltd., Japan
T. Tazawa, JEOL Ltd., Japan
Y. Iijima, JEOL Ltd., Japan
C. Nielsen, JEOL Inc.
T. Ichinokawa, Waseda University, Japan
Correspondent: Click to Email
The atomic number (Z2) effect of the secondary electron yields for metals was compared by using secondary electron microscope (SEM), secondary ion microscope (SIM) imaging and X-ray photoelectron spectroscope (XPS) imaging. The atomic number (Z2) effect of the secondary electron yields for metals has recently experimented in secondary electron microscope (SEM) and secondary ion microscope (SIM) imaging (1). The Z2 dependence of the secondary electron yields is opposite to each other and the brightness of the secondary electron image by electron bombardment increases with increasing Z2, while the brightness of the secondary ion image by Ga+ or Ar+ ion bombardments decreases with increasing Z2. In this experiment, the Z2 dependence of the secondary electron yields in electron and X-Ray excitation are the same and opposite to that in ion excitation. The brightness of the secondary electron images by X-Ray bombardment increase with increasing Z2. These phenomena have been found by this experiment and compared with a difference of emission mechanisms for electron, ion and X-Ray bombardment for metal. The experiment was carried out by using an X-ray photoelectron spectroscope (JPS-9010MC). A photoelectron analysis for XPS has become a well- recognized in surface chemical analysis. The secondary electron peak at about 1 to 20eV was not used for the chemical analysis. But this peak will use for imaging observation, because the intensity of its is higher than the photoelectron peaks. A scanning secondary electron images by X-Ray excitation were measured by a stage scanning imaging method. The analyzing area was selected with the 200um aperture and scanned with a motor controlled stage. A specimen is the plate of Al, Cu, Ag and Au. The secondary electron energy from each metal as excited Mg-Ka(1253.6eV) and monochrometored Al-Ka(1486.6eV) was measured with a hemi-spherical electron analyzer at a constant retarding method (0.6%). For metal, the Z2 dependence of the secondary electron yields in X-Ray excitation increases with increasing Z2.