AVS 49th International Symposium
    Surface Engineering Tuesday Sessions
       Session SE+NS-TuM

Paper SE+NS-TuM11
Tribological Analysis of Nano-composite Diamond-like Carbon Films Deposited by Unbalanced Magnetron Sputtering

Tuesday, November 5, 2002, 11:40 am, Room C-111B

Session: Nanocomposite and Nanolayered Coatings
Presenter: D.-Y. Wang, Mingdao University, Taiwan
Authors: D.-Y. Wang, Mingdao University, Taiwan
Y.-Y. Chang, National Chung-Hsing University, Taiwan
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Ti contained nano-composite DLC coatings have been developed with improved tribological characteristics. These coatings were synthesized using an unbalanced magnetron sputtering (UBMS) process with a combination of graphite and metal targets. A 100 kHz pulsed d.c. power supply was applied to the substrates to control the substrate arcing and radical excitation during the DLC formation. The microstructure of the nano-composite DLC film was investigated by using cross-section TEM/SAD, x-ray diffraction, Raman and XPS. Tribological properties such as wear mechanism, transfer phenomenon, friction coefficient, and wear life were evaluated and compared with commercial Ti-C:H DLC coatings by using pin-on-disk wear test analyses. The optimized Ti/C multi-layered DLC coatings give satisfied friction performance in the pin-on-disk test with lower wear rate of 1-3 x 10@super -17@ m@super 3@/Nm and lower friction coefficient of 0.09-0.1 sliding against 100Cr6 and WC materials. The easily transferred oxide- free graphite-like sp@super 2@ phases form a lubricious layer, which posses low shear strengths under applied stresses. The low friction coefficients and wear rates during the tribological action are anticipated.