AVS 49th International Symposium
    Nanotubes: Science and Applications Topical Conference Tuesday Sessions
       Session NT-TuP

Paper NT-TuP3
Synthesis of Single-walled Carbon Nanotubes on Thin Film Catalysts via Chemical Vapor Deposition

Tuesday, November 5, 2002, 5:30 pm, Room Exhibit Hall B2

Session: Poster Session
Presenter: Y.J. Yoon, Yonsei University, Korea
Authors: Y.J. Yoon, Yonsei University, Korea
J.C. Bae, Yonsei University, Korea
H.K. Baik, Yonsei University, Korea
S.J. Lee, Kyungsung University, Korea
K.M. Song, Konkuk University, Korea
Correspondent: Click to Email
Synthesis of single-walled carbon nanotubes (SWNTs) via chemical vapor deposition (CVD) has attracted notable attentions due to its low reaction temperature, compared to other processes. It enables SWNTs to be easily applied to electronic devices such as transistors, and chemical sensors. Recently, many researchers have been reported the synthesis of SWNTs on powder supports via CVD. However, synthetic method of SWNTs on flat Si substrates via CVD is not fully established due to the difficulty of catalyst control. The main issue of SWNT synthesis via CVD is the optimization of catalyst preparation. In this paper, to improve a yield and selectivity of SWNTs on patterned Si substrate, the optimization of catalyst was progressed by thermodynamic approaching. Catalysts were prepared by thin film deposition (Co, Ni, Fe, Mo and their alloys) on silicon substrate using D.C. magnetron sputtering system with an accurate thickness controller in angstrom scale. SWNTs were grown by catalytic decomposition of methane and hydrogen gas at the temperature range between 700@super o@C and 1000@super o@C. In order to investigate the formation mechanism of SWNTs, the characterization of nanoparticles and SWNTs by SEM, TEM, and Raman was performed. The nucleation and growth step for SWNTs on various catalysts will be presented by thermodynamic approaching.