AVS 49th International Symposium
    Nanotubes: Science and Applications Topical Conference Tuesday Sessions
       Session NT-TuA

Paper NT-TuA4
Self-Aligned Mechanical Attachment of Carbon Nanotubes to Surfaces

Tuesday, November 5, 2002, 3:00 pm, Room C-209

Session: Nanotubes: Mechanical Properties, NEMS
Presenter: K. Bylund, Brigham Young University
Authors: K. Bylund, Brigham Young University
J.D. Whittaker, Brigham Young University
D. Kitchen, Brigham Young University
M. Housley, Brigham Young University
R.C. Davis, Brigham Young University
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We have investigated self-aligned transition metal silicides and other thin film deposition based processes for the mechanical attachment of carbon nanotubes to silicon surfaces. These processes could aid in the mass production of carbon nanotube based AFM probes and NEMS devices. In each process, thin films are deposited and processed to secure nanotubes to silcon surfaces. An investigation of the efficacy of these processes has motivated fundamental research on the interaction of carbon nanotubes with transition metals and their silicides at varying temperatures. We will present the effects of the metal deposition, silicide formation, and wet chemical etching on the films and the nanotubes as observed by scanning electron microscopy (SEM) and x-ray photoelectron spectroscopy (XPS).