AVS 49th International Symposium
    Nanotubes: Science and Applications Topical Conference Monday Sessions
       Session NT-MoM

Paper NT-MoM8
Carbon Nanotube Growth for Nanomechanical Devices

Monday, November 4, 2002, 10:40 am, Room C-209

Session: Nanotubes: Growth and Characterization
Presenter: M.E. Hoenk, Jet Propulsion Laboratory, California Institute of Technology
Authors: M.E. Hoenk, Jet Propulsion Laboratory, California Institute of Technology
R.S. Kowalczyk, Jet Propulsion Laboratory, California Institute of Technology
M.J. Bronikowski, Jet Propulsion Laboratory, California Institute of Technology
E.W. Wong, Jet Propulsion Laboratory, California Institute of Technology
D.S. Choi, Jet Propulsion Laboratory, California Institute of Technology
F. Noca, Jet Propulsion Laboratory, California Institute of Technology
R.M. Williams, Jet Propulsion Laboratory, California Institute of Technology
M.E. Taylor, Jet Propulsion Laboratory, California Institute of Technology
B.D. Hunt, Jet Propulsion Laboratory, California Institute of Technology
Correspondent: Click to Email
Mechanical resonators with nanometer dimensions offer the capability for sensors and actuators to interact with materials at the molecular scale. We are developing device structures based on carbon nanotube mechanical resonators. While the unique mechanical and electronic properties of carbon nanotubes are promising for this application, the relationship between growth conditions and nanotube properties plays a major role in nanotube device development. In this paper, we will present our most recent results on the growth, processing, and characterization of carbon nanotube arrays. We have grown aligned carbon nanotube arrays over a wide range of pressures and temperatures using thermal and plasma-enhanced chemical vapor deposition. We have experimented with a variety of catalyst materials, growth conditions, and patterning techniques, and we have characterized the catalysts and nanotubes using scanning and transmission electron microscopy, Raman spectroscopy, and atomic force microscopy. We have demonstrated growth of aligned arrays of carbon nanotubes at temperatures as low as 411 C. The research described in this paper was performed at the Jet Propulsion Laboratory, California Institute of Technology, and was jointly sponsored by the National Aeronautics and Space Administration, Office of Aerospace Technology, and the Defense Advanced Research Projects Agency, Microsystems Technology Office.