IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Advancing toward Sustainability Topical Conference Tuesday Sessions

Session AT-TuP
Poster Session

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

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Click a paper to see the details. Presenters are shown in bold type.

AT-TuP2
Global Warming Gas Emission During Plasma Cleaning Process of Silicon Nitride PECVD Chamber Using C@sub 4@F@sub 8@O and Mixtures
K.J. Kim, Y.S. Ahn, N.-E. Lee, B.H. Oh, J.H. Kim, G.Y. Yeom, Sungkyunkwan University, Korea