IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Vacuum Science & Technology Thursday Sessions
       Session VST2-ThP

Paper VST2-ThP5
Development of TiN Coating for the SNS Ring Vacuum Chambers@footnote *@

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Vacuum Issues in Accelerators Poster Session
Presenter: P. He, Brookhaven National Laboratory
Authors: P. He, Brookhaven National Laboratory
H.C. Hseuh, Brookhaven National Laboratory
R. Todd, Brookhaven National Laboratory
Correspondent: Click to Email
The inner surface of the ring vacuum chambers of the US Spallation Neutron Source (SNS) will be coated with ~ 100 nm of titanium nitride (TiN). This will minimize the secondary electron yield from the chamber wall, and thus avoid the so-called e-p instability caused by electron multipacting as observed in positron storage rings and a few high-intensity proton storage rings. An R&D program has been carried out to develop coating parameters that give proper stoichiometry and suitable thickness for the vacuum chambers. DC sputtering and DC-magnetron sputtering were conducted in chambers of relevant material and geometry to SNS ring vacuum systems. Auger Electron Spectroscopy and Rutherford Back Scattering were used to analyze the coating for thickness, stoichiometry and impurity. Excellent results were obtained with magnetron sputtering. This paper will present the development of the coating process, the surface analysis results and the coating of the 4-m long production chambers. @FootnoteText@ @footnote *@Work performed under the auspices of the U.S. Department of Energy.