IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Vacuum Science & Technology Thursday Sessions
       Session VST2-ThP

Paper VST2-ThP2
The Greatest Ultra-high Vacuum System of Cryopump in China

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Vacuum Issues in Accelerators Poster Session
Presenter: J.M. Chen, Beijing Institute of Satellite Environment Engineering, P.R. China
Authors: C.Y. Zhang, Beijing Institute of Satellite Environment Engineering, P.R. China
J.M. Chen, Beijing Institute of Satellite Environment Engineering, P.R. China
Correspondent: email address not available
A large ultra-high vacuum facility of cryopump has been developed in China. The vacuum chamber in this facility consists of three parts, that is: the main chamber, 12m diameter and 22m height; the auxiliary chamber 7.5m diameter and 15m length; the special test chamber, 5m diameter and 15m length. The volume of the main and auxiliary chamber is 3200m@super 3@. The chambers are made up of the stainless steel. It is the greatest ultra-high vacuum facility in China. The roughing vacuum systems consist of 4 sets of the JZJLH-5000 roots vacuum pump system and a cold trap, which is 2m diameter and used as to prevent back streaming of pump oil. The roots vacuum pump system includes a ZJ-5000 main roots pump, a ZJB-1200 roots pump, a ZJL-600 circulatory gas cooled roots pump and a H150 rotary plunger vacuum pump. The degree of vacuum in the chamber can reach 0.7 Pa after 5h roughing time. The ultra-high pump systems in the main and auxiliary embrace the 8 sets of cryopump, which are installed on the outside of the chamber, an internal Helium cryopump (cryo panel), which is set in the chamber, and three sets of turbo molecular pump, which are used as auxiliary ultra-high pump system and the main pump for the vacuum leak system. The cryopump has a 5x10@super 4@l/S volume of flow rate, the internal Helium cryopump 2x10@super 6@l/S and the turbo molecular pump 2200 l/s. The vacuum measure system consists of the tens gauge heads and vacuum gauges, which include the nude gauge, Bayard-Alpert gauge, total pressure range of vacuum gauge. It can attain the measure range of pressure from 10@super 5@ Pa to 10@super -6@ Pa.