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    Vacuum Science & Technology Thursday Sessions
       Session VST1-ThP

Paper VST1-ThP3
Calibration Apparatus of Mass Spectrometer for Partial Pressure Analysis using Dynamic Flow Method

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Pressure Measurement & Calibration Poster Session
Presenter: F. Yan, LanZhou Institute of Physics, P.R. China
Authors: D. Li, LanZhou Institute of Physics, P.R. China
Z. Li, LanZhou Institute of Physics, P.R. China
F. Yan, LanZhou Institute of Physics, P.R. China
D. Zhang, LanZhou Institute of Physics, P.R. China
J. Zhang, LanZhou Institute of Physics, P.R. China
H. Xu, LanZhou Institute of Physics, P.R. China
Y. Gong, LanZhou Institute of Physics, P.R. China
L. Li, LanZhou Institute of Physics, P.R. China
Correspondent: Click to Email
In order to solve the problem of calibration of mass spectrometer, we had designed and made the calibration apparatus of mass spectrometer for partial pressure analysis using dynamic flow method, which had the ability to calibrate all kinds of mass spectrometer. The calibration apparatus was composed of the source system of gas, the inlet system of gas, the chamber of calibration, the pumping system, the collecting and processing system of data. To gain the accurate measure of partial pressure,we adopted spin rotary gauge(SRG) as the measure standard.the measurement range is 10 @super -1@ to 10@super -6@Pa. There were three independent source and inlet systems of gas in the same structure in the calibration apparatus. Gas brought from anyone of three independent source and inlet systems of gas can produce a partial pressure ranged from 10@super -1@to 10@super -6@Pa. Thus, it not only provides the basic for calibrating, but also is easier to calibrate. To acquire the well-distributed molecular flow in the chamber of calibrating, the spherical chamber of calibrating is 350mm in diameter. On the basic symmetry principle, the normal of the equator plane on which seven CF35 and a CF63 were mounted on the spherical chamber was aligned with the boresights of the inlet aperture and the outlet aperture to the chamber, so that SRG and calibrated mass spectrometer located in the same condition. To realize automatic collecting and processing of data, we have applied the computer technology .the software designed on our own is convenient for user. the main technical data is: Ultimate pressure: 5×10@super -7@Pa Calibration range: 10@super -1@ to 10@super -6@Pa uncertainty: @<=@4.8% Calibrated gas: 1 to 3 different gas The calibration apparatus can be used for calibration of sensitive,linearity,stability ,etc of mass spectrometer.